Reducing Actuation Voltage of the Elliptical RF-MEMS Switches Using a Novel Cutting Pattern
Subject Areas : electrical and computer engineering
Mohammad
Jahanbakht
1
A. A.
Lotfi-Neyestanak
2
M.
Lotfi-Neyestanak
3
Mohammad
Tondro-Aghmiyouni
4
Keywords: Elliptical structure micro electromechanical switches actuation voltage MEMS,
Abstract :
The elliptical structure for the micro electromechanical switches with low actuation voltage is proposed to work at the Ka band. The actuation voltage of this structure is shown to further been reduced by 21% with transverse cutting patterns. This Switch will then be analyzed to extract its parameters such as Insertion Loss, Return Loss, and Deformation Posture. The effect of the actuation voltage on the deformation of the bridge will then be analyzed and the results would be compared with other common bridges. This switch may be used as a low loss and effective element for much complicated systems such as distributed phase shifters and phased array applications.
[1] E. Abbaspour Sani and S. Afrang, "A low voltage MEMS structure for RF capacitive switches," Progress in Electromagnetics Research, PIER, vol. 65, pp. 157-167, 2006.
[2] E. Abbaspour Sani, N. Nasirzadeh, and G. Dadashzadeh, "Two novel structures for tunable MEMS capacitor with RF applications," Progress in Electromagnetics Research, PIER, vol. 68, pp. 169-183, 2007.
[3] R. Chan, R. Lesnick, D. Becher, and M. Feng, "Low - actuation voltage RF MEMS shunt switch with cold switching lifetime of seven billion cycles," J. of Microelectromechanical Systems, vol. 12, no. 5, pp. 713-719, Oct. 2003.
[4] Z. Jamie Yao, S. Chen, S. Eshelman, D. Denniston, and C. Goldsmith, "Micromachined low - loss microwave switches," IEEE J. of Microelectromechanical Systems, vol. 8, no. 2, pp. 129-134, Jun. 1999.
[5] F. Plotz, F. S. Michaelis, R. Aigner, H. J. Timme, J. Binder, and R. Noe, "A low - voltage tensional actuator for applications in RF micro - switches," Sensors and Actuators, vol. 92, no. 1-3, pp. 312-317, Aug. 2001.
[6] J. Rizk, G. L. Tan, J. B. Muldavin, and G. M. Rebeiz, "High -isolation W - band MEMS switches," IEEE Microwave and Wireless Components Letters, vol. 11, no. 1, pp. 10-12, Jan. 2001.
[7] H. T. Kim, J. H. Park, J. Yim, Y. K. Kim, and Y. Kwon, "A compact V - band 2 - bit reflection - type MEMS phase shifter," IEEE Microwave and Wireless Components Letters, vol. 12, no. 9, pp. 324-326, Sep. 2002.
[8] M. Jahanbakht, M. N. Moghaddasi, and A. A. Lotfi Neyestanak, "Fractal beam Ku - band MEMS phase shifter," Progress in Electromagnetics Research Letters, vol. 5, pp. 73-85, 2008.
[9] J. J. Hung, L. Dussopt, and G. M. Rebeiz, "Distributed 2- and 3 - bit W - band MEMS phase shifters on glass substrates," IEEE Trans. on Microwave Theory and Techniques, vol. 52, no. 2, pp. 600-605, Feb. 2004.
[10] G. M. Rebeiz, RF MEMS: Theory, Design, and Technology, Wiley Inter Sciences, 2003.
[11] G. M. Rebeiz, "Phase-noise analysis of MEMS-based circuits and phase shifters," IEEE Trans. on Microwave Theory and Techniques, vol. 50, no. 5, pp. 1316-1323, May 2002.
[12] J. S. Hayden and G. M. Rebeiz, "Very low-loss distributed X-band and Ka-band MEMS phase shifters using metal-air-metal capacitors," IEEE Trans. on Microwave Theory and Techniques, vol. 51, no. 1, pp. 309-314, Jan. 2003.
[13] ح. ا. زلفخانی، ج. راشد محصل و ف. حجت کاشانی، "تحلیل و طراحی تغییردهنده فاز N بیتی MEMS توزیعشده در باند Ka،" نشریه دانشکده فنی دانشگاه تهران، جلد 41، شماره 5، صص. 630-623، آذر 1386.
[14] K. Topalli, M. Unlu, H. I. Atasoy, S. Demir, O. A. Civi, and T. Akin, "Empirical formulation of bridge inductance in inductively tuned RF MEMS shunt switches," Progress in Electromagnetics Research, PIER, vol. 97, pp. 343-356, 2009.
[15] M. Jahanbakht, M. N. Moghaddasi, and A. A. Lotfi Neyestanak, "Low actuation voltage Ka - band fractal MEMS switch," Progress in Electromagnetics Research C, vol. 5, pp. 83-92, 2008.